| 000 | 00366nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 211115s9999 xx 000 0 und d | ||
| 041 | _aeng | ||
| 082 |
_aC216 _bM0.8 |
||
| 100 | _aGrabmaier, J.. | ||
| 245 | 0 | _aSilicon Chemical Etching / | |
| 250 | _a1st ed / | ||
| 260 |
_aBerlin : _bSpringer-Verlag. |
||
| 300 | _ap.226 : | ||
| 650 | _aPhysics | ||
| 942 | _cTB | ||
| 999 |
_c2655 _d2655 |
||