TY  - BOOK
AU  - Machlin, E.S.  .
TI  - Materials science in microelectronics / 
SN  - 0-080-44639-6
U1  - C 
PY  - 2006///
CY  - Oxford : 
PB  - Elsevier Ltd. , 
KW  - Microelectronics
ER  -