Borisenko, Victor E.. <br/><br/>
Rapid Thermal Processing of Semiconductors /  
by Victor E.Borisenko & Peter J.Hesketh. 
 - 1st ed. /  
 - New York :   Plenum Press ,   1997 
 - 358p :  
<br/><br/><label>ISBN: </label>0-306-45054-2 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C5  / N7